

Non-Destructive Test (NDT)
SAM
Texturing (surface morphology)
Optical Profiler,SEM,TEM
Film type and thickness
SEM/EDS,TEM/EDS
Cell structure
SEM/EDS,TEM/EDS
Substrate defects (crystalline defects)
TEM,SEM,EMMI
Failure Analysis
SAM,F(xiàn)IB,TEM,SEM
Reliability test